Workstation of the photoelectron spectroscopy and nanotechnology for the synchrotron radiation source with a possibility of a possibility of the analysis of the samples by means of the scanning probe microscopy.

The purpose of the given project is the implementation of an unique photoelectric spectrometer on the Kourchatov synchrotron radiation source (تبرب), that allow of the time with the traditional photoelectric researches to realize the researches of the nature and the spatial non - informities of the physical and chemical properties of an investigated samples by means of the methods of scanning probe microscopy both for the massive and film samples in situ. Given spectrometer will be mounted on the station of the synchrotron radiation source "Sibir 1", the monochromator which allow to work in the field of the photon energy 5 - 100 eV. It is supposed to make this device available for the wide circle of the users. For this purpose it is supposed to decide the following tasks:
· An implementation of the photoelectric spectrometer (PhS) with the energy resolution of ~ 50 meV with the possibilities:

- ion etching and an analysis of the samples surface by means of method of the Auger spectroscopy; - diffraction of the slow electrons; - cooling of the sample up to the liquid helium temperature; - transportation of the samples from an atmosphere to the research chamber; - evaporation of an each films including an ion plasma method; - crystal cut; - measurement of the conductivity of the evaporated films in situ.

· The realization of the multimode scanning probe microscope (SPM) with an atomic resolution, available to function under conditions of the super-high vacuum.
· The implementation of the system for the transfer the samples from PhS to SPM and back without the distortion of the super-vacuum conditions.

Scanning probe microscope.

Operation conditions: - modes of contact and lateral microscopy; - mode of the resonant microscopy with the system of an electron damping of the cantilevers Q - factor; - opportunity of registration of the module, the amplitude projections of signal, excited the oscillations, opportunity of the registration of the fractional harmonics with highest frequency up to 1.8 MHz; - magnetoforce mode and mode of the registration of the electrical forces; - Kelvin mode, capacitive mode (registration regimes of the local static not uniformity of the dopants distribution and in semiconductors and static charge not uniformity); - STM mode and SPM modes for the registration of the distribution of the binding energy and the density of the states; - current mode with the simultaneous registration of the topographical characteristics of surface; - STM - SFM two - way mode; - adhesive mode; - nanolithography unit regime with a possibility of an implementation of the modulation tensoinduced modification of the surface; - scan size - up to 1000 x 1000 points; - scanners: 10 x 10 x 1.5 mm (for the researches of "rough" surfaces and nanomanipulations, nanoindentation, nanolithography); Resolution of SPM: - STM mode: atom resolution on Si (111) and Au (111); - contact SFM mode: atom resolution on the mica and Au (111); - contactless SFM mode: atom resolution on Si (111). It will be provided the possibility of the manipulation change of the cantilevers and samples under conditions of the super high vacuum. The temperature of an sample: (at work with PhS) 4 - 1000 K, the temperature of an sample (at work with SPM) 90 - 450K, operating vacuum - 10 annealing temperature ~ 160°C.

Basing of the station necessity
The photoelectric spectroscopy, developing intensively lately owing to using of the sources of synchrotron radiation (SSR) is an effective method of study of the electron structures of materials. An application of the PhS method for the study of the electron structures of the solid states help successfully to decide the fundamental tasks of solid state physics, physics of the surface, material science, microelectronics, surface catalysis and a number of other areas of science, determining an up-to-date scientific and technical progress. Owing to an application of PhS is precisely determined the electron structures of the filled states of the researched materials. The photoelectric spectroscopy is the direct and versatile method for the research of the electron structures of the solid states and their surface. This method become especially effective by the using as an excited radiation source - a monochrome synchrotron radiation, tuned on the length of a wave. The high surface sensitivity make it particularly valuable for the research of the surface physics and ultra thin films, which are the basis for the development of a number of the up-to-date technologies. It is supposed on the synchrotron radiation source "Zelenograd" to realize PhS, that will be provide by the preliminary chamber for the bonding of the samples and surface processing with the transport system in a measurement chamber. In a measurement chamber will be also the units for the evaporation of the multi layer film structures by the different methods. In a spectrometer also it is stipulated the possibility to change the temperature of a researched sample in a range from the temperature of liquid helium to 1000°.
For an interpretation of the PhS data it is necessary to know the microstructures of the researched sample. It is important, since the above mentioned new materials are often represent according to their nature the samples with the heterogeneous phase. The limitation of the PhS synchrotron radiation consist in the integral character of the method. It does by urgent addition of the PhS by the the analytical method of high localization with a possibility to receive the plural information about the topographic distribution of a number of physical, electrophysical, physical and chemical characteristics of the surface. In last some years have appeared and during of three last years was impetuous developed and has received a wide circulation a new class of methods and devices - the scanning probe microscopes (SPM), capable to give the spatial resolution in an Angstrem parts and to become the images of the separate atoms and also a number interesting characteristics of a surface with an atomic spatial resolution. As first specimen of this device class was a scanning tunnel microscope. The modern devices are capable to work in a multi mode regime and to give the versatile information about a sample properties: a conductivity of sample surface, a sample microrelief, a spatial distribution of the atoms on the surface, a distribution of the work electron function, a microhardness and a surface viscosity of the adsorbed layers, a non-uniformity of the magnetic moment and the magnetization, an energy of the surface plasmons, a fluorescence and other properties, supplementing the information, received by means of PhS. It is essential also, that by means of SPM is paved the way to the new technological processes, such as a nanotechnology, opening a new era in a microelectronics and allowing to realize the electron devices with element sizes of an order 1 nm. The statement of complex researches including PhS and SPM methods, assumes creation of uniform experimental unit in that a realization of the clean sample surface and all researches will accomplished in a single vacuum cycle without an exposure of the sample under atmospheric conditions. A SPM module will be connected with a basic chamber of PhS through a lock.
Novelty
Now there are no units, in which the realization of researches by the PhS and SPM methods on the same sample in situ is possible without the sample exposure under an atmosphere conditions. In a case of the realization of the spectrometer PhS with SPM will be implement an unique experimental unit, combining in over high-sensitive integrated method and the methods of the limiting localization. Such system now has not direct analogues, though the systems PhS, working on x-ray tubes in a combination with SPM in the world are available (MULTYPROBE SYSTEM, OMICRON VAKUUMPHYSIK GmbH). The cost of the system makes 2.3 millions DM. An application of PhS with the possibilities of a nanotechnological analytical SPM makes this system unique and extremely attractive for the investigators.
The unique unit is supposed to manufacture in a single specimen, but owing to their experimental possibilities and in a case using it as the device of an joint using, a developed spectrometer will allow to improve essentially the experimental base for the researches of the different materials, both for the science purposes (a physics of the condensed state, a physics of the surface) and for the applied purposes (microelectronics, catalysis problems and others). In the future it is possible to spread the experience, received by the development of this machine for the design of the workstations to the other sources of a synchrotron radiation.
The manufacturing of such device is quite real within 1.5 years, as the project is well worked and for manufacturing various assemblies of the device there are all necessary technical decisions. The photoelectric part of a device is ready to a considerably extent (65% readiness). The basic assemblies of a SPM and the transfer of the samples from a research chamber of PhS in the module SPM were broadboarded with the participation of the scientific and industrial firm NT MDT (Zelenograd).