Multiprobe cartridges for the scanning probe microscopes

The scanning probe microscopy concern to the new, perspective methods of the surface analysis for the scientific and practical applications. This methods are capable to provide the spatial resolution in a parts of Angstrem and to receive the images of the separate atoms and the number of other characteristics with an atomic spatial resolution. The scanning tunnel microscope is the first representative of the there devices class, given the possibility to see the distribution of the electron properties of the surface structures, modeled by the electrostatic field of an atomic lattice. An up-to-date scanning probe microscopes are capable to work in a multimode regime and to receive the versatile information about the sample properties: a surface conductivity of the sample, a microrelief, a spatial distribution of atoms on the surface, a distribution of the works electron function, a microhardness and a surface viscosity of the adsorbed layers, non-uniformity of the magnetic moments and an magnetization, the optical and electrooptical properties of the surface, a fluorescence and other properties. To receive such complex of the information it is possible only through replaceable probes with the different functional characteristics. Thus the opportunity of fast research of the different properties (for example, magnetic and electrostatic) those some fields of a surface s lost, that bring down an information value for the researches in physics.
The purpose of the given project is an implementation of the multiprobe cartridge for the analytic devices of a new type - multiprobe scanning microscope for the study and testing of the objects. This development is based on the claims on an invention ¹ 96123099/09 (029880) ("Multiprobe cantilever for the scanning probe microscope" and ¹ 97100591 (000696) of 23 January 1997 "Scanning probe microscope", which introduction is capable to change qualitatively the possibilities of the devices. The multiprobe design of the device is most important for the technological application, even it the probes are equally. An application of the controlled probes system, when only an operating probe is lowered allow to work of the device with single cartridge during the several month (in place of 2 - 3 days at present). For this time the probe, as a rule, becomes soiled or breaks and its replacement is required, that reduces technological value of the device for its application in technological lines of the control. The created device should ensure:
- compatibility with the manufactured scanning probe microscope SOLVER (of firm NT-MDT) and the principal possibility of an adaptation to the microscopes of the other firms - manufacturers of the SPM equipment;
- allow the realization of the multimode scanning microscope regime.
Operation conditions:

Operation conditions: - modes of contact and lateral microscopy; - mode of the resonant microscopy with the system of an electron damping of the cantilevers Q - factor; - opportunity of registration of the module, the amplitude projections of signal, excited the oscillations, opportunity of the registration of the fractional harmonics with highest frequency up to 1.8 MHz; - magnetoforce mode and mode of the registration of the electrical forces; - Kelvin mode, capacitive mode (registration regimes of the local static not uniformity of the dopants distribution and in semiconductors and static charge not uniformity); - STM mode and SPM modes for the registration of the distribution of the binding energy and the density of the states; - current mode with the simultaneous registration of the topographical characteristics of surface; - STM - SFM two - way mode; - adhesive mode; - nanolithography unit regime with a possibility of an implementation of the modulation tensoinduced modification of the surface; Resolution of SPM: - STM mode: atom resolution on the monocrystalline pyrolytic graphite; - contact SFM mode: atom resolution on the mica;

- multimode regime must provided by the using of a single cantilever cartridge, having the controlled probes with the dielectric coating, located from each other with an equal step 10 - 100 microns, the conductive probes, the magneto sensitive probes, the thermosensitive probes, the light probes, that allow the possibility to study an one and the same surface section by means of movement of the positioning stepper on the stage of which installed the sample;

- the quantity of the probes in a cartridge - from 16.